SS Scientific Ltd

Heated Sample Holder

The Sample Holder (OSSH) consists of a rotary magnetic feedthrough for sample rotation in ultra high vacuum environments.
The rotary movement allows uniform consumption of the target material.
The OSSH is installed on a CF63 flange with an embedded heater allowing sample temperature to reach up to 900°C with extremely low heat outflow into the surroundings.
The OSSH is equipped with a thermocouple temperature control device and is affixed on a linear translator allowing the port axis aligned to the target.

Characteristics

Substrate Temperature up to 900°C
Sample Dimensions Ø up to 40mm, width up to 3.5mm
Connecting Flange UHV DN63CF
Power Transmission by magnetically coupled rotary feed through
Rotational Speed (adjustable) from 0 to 60 rpm
Z Axis (adjustable) 50mm


Heated sample holder

Target Holder

The Target Holder (OSTH) allows the correct positioning of the ablation material (target) during deposition.
The possibility to rotate the target during the deposition allows a uniform consumption of materials over a wide area surface.
The device can be adjusted according to three different positions controlled from the outside for optimal target positioning.

Characteristics

Target Dimensions Ø up to 32mm, width 6-10mm
Connecting Flange UHV DN40CF
Power Transmission by magnetically coupled rotary feedthrough
Variable Rotating Speed (adjustable) from 0 to 60 rpm
Z Axis (adjustable) 150mm
Distance Between the Flange and the Target from 160 to 330mm
Adjustable X, Y Tilting of the Target up to +/- 5°
Flange for the Gas Inlet UHV DN16CF
 

Target holder